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Focused Ion Beam Systems


This topic was my term presantation of microelectronic technology lecture that code name EHB 427E. I want to share my research on the internet so this report gives information about technology focused on Ion Beam System.

The simple basic structure was discussed. Microfabrication Techniques were described in general and information about usage of FIB was given. A brief research about the history of FIB technology was given.

Also, it was mentioned about the importance and advantages of today’s FIB technology. It was investigated in several studies in Turkey.


My Journal paper :

İndir (PDF, 238KB)

My Presentation:

İndir (PDF, 1.11MB)

So, what do you think ?